In the entire semiconductor manufacturing process, particle contamination, electrostatic discharge damage and the associated equipment downtime are the three major problems caused by static electricity. Therefore, static electricity must be controlled. The International Semiconductor Development Roadmap and SEMI standards have put forward suggestions for controlling static electricity at an appropriate level. Static control solutions include grounding, static dissipative materials and air ionization. In order to meet the requirements brought about by the rapid development of semiconductor production, static dissipative materials and air ionizers are also constantly changing.

In the semiconductor device production workshop, the output of ultra-large-scale integrated circuits will be greatly reduced due to dust adsorption on the chip. The operators in the production workshop wear clean work clothes. If the human body is full of static electricity, dust and dirt can be easily absorbed. If these dust and dirt are brought to the operation site, the product quality will be affected, the product performance will deteriorate, and the yield rate will be greatly reduced. If the radius of the adsorbed dust particles is larger than the width of the line and the film thickness is low, the product is most likely to be scrapped.

Therefore, it is necessary to establish an electrostatic protection system during processing, production and packaging. The integrated circuit packaging production line has more stringent requirements for static electricity. In order to ensure the normal operation of the production line, the cleaning workshop should be completely decorated with anti-static building materials, and all personnel entering and leaving the cleaning workshop should be equipped with anti-static clothing and other hardware measures. In addition, packaging companies can formulate corporate standards or specific anti-static requirements based on relevant national standards and the actual situation of the company to cooperate with the normal operation of the packaging production line.

Since there are many types of dust removal and electrostatic equipment, how to choose the right product for you mainly depends on the conditions on the production line. The following describes several devices that can remove dust and static electricity:

1. Ion fan: The main function of the ion fan is to remove static electricity. It has outstanding anti-static performance and prevents static pollution and damage. It is an ideal device for electronic production lines to prevent electrostatic discharge (ESD) and personal electrostatic protection areas (EPA) such as maintenance stations. It is designed specifically for local areas. It has the characteristics of small size, light weight, and easy installation.

2. Ion wind rod: minimum length of 180mm, achieve static electricity removal in the range of 600-800mm, suitable for fast static electricity removal in small spaces

3. Ion wind nozzle: There are three styles: ordinary, induction and pedal, which can meet the needs of customers in different environments of the production site. Ion wind snake is suitable for stations with space for placement and no need for human operation, but the dust blowing direction needs to be adjusted frequently.